| 摘要 |
<P>PROBLEM TO BE SOLVED: To detect vibration of two axes while realizing miniaturization, enhancement of characteristics, and cost reduction. <P>SOLUTION: This vibration gyro-sensor 1 includes a support substrate 2 with a wiring pattern 5 formed thereon having a plurality of lands 4, and vibration elements 20 mounted on a surface of the support substrate 2. At least two vibration elements 20X and 20Y for detecting vibrations in axial directions different from each other are mounted on the one support substrate 2. By mounting the two vibration elements 20X and 20Y with axial directions of vibrator parts 23 made different from each other, it is made possible for the respective vibration elements 20 to obtain detection signals in two axial directions independently of each other. This makes it possible to manufacture the respective vibration elements 20 efficiently at a low cost and to enhance reliability through stable motion. <P>COPYRIGHT: (C)2007,JPO&INPIT |
