| 摘要 |
<P>PROBLEM TO BE SOLVED: To maintain favorable control characteristics in every state of applied voltage when a piezoelectric actuator is current-controlled whose capacitance is varied depending on applied voltage. <P>SOLUTION: A position controller for piezoelectric actuators includes a piezoelectric actuator constructed of a piezoelectric element, a movable member driven by the piezoelectric actuator, a displacement sensor that detects displacement of the piezoelectric actuator or the movable member, a current source for supplying current to the piezoelectric actuator, and a compensator that gives a current command to the current source based on the detection value on the displacement sensor. The position controller is so constructed that the feedback gain of the compensator is changed to a predetermined value according to the detection value on the displacement sensor. <P>COPYRIGHT: (C)2007,JPO&INPIT |
