| 摘要 |
PROBLEM TO BE SOLVED: To provide the semiconductor evaluation apparatus that can evaluate substrates with a high sensitivity. SOLUTION: The apparatus includes a probe laser Pb that radiates a first probe light moving towards a semiconductor substrate. A first half mirror Mh2 gets a second probe light forming a part of the first probe light from the first probe light. An optical power meter and detector D loads both a first reflection probe light due to the reflection of the first probe light by the semiconductor substrate, and a second reflection probe light due to the reflection of the second probe light by the first reference sample having an internal state for reference, into the same optical axis. COPYRIGHT: (C)2007,JPO&INPIT
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