| 摘要 |
PROBLEM TO BE SOLVED: To quickly measure a three-dimensional shape of an object, and to shorten a measuring time when measuring the three-dimensional shape of the object. SOLUTION: This method of controlling a contact type tactile sensor having a piezoelectric oscillation plate with a driving electrode and a feedback electrode, and a needle fixed onto the piezoelectric oscillation plate, wherein the needle is finely vibrated by impressing an alternating current to the driving electrode and wherein a feedback voltage is output from the feedback electrode in response to the vibration, has the first step for obtaining a relative distance between the contact type tactile sensor and the measuring object, based on a difference between a prescribed reference amplitude value and a current amplitude value, and the second step for obtaining a velocity of the contact type tactile sensor, based on a history of a change in the relative distance obtained in the first step. COPYRIGHT: (C)2007,JPO&INPIT
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