End effector with integrated illumination system for reticle pre-alignment sensors

摘要

An apparatus includes a first support structure configured to support an element that has an alignment marker. The apparatus also includes an alignment sensor comprising a light source that is integrally formed on the first support structure and is configured to provide a light beam that illuminates the alignment marker and at least one detector configured to detect the position of the alignment marker by analyzing the light beam transmitted through the element. Such an apparatus may be used to align of the element with respect to the first support structure.