摘要 |
Provided is a chip sorter including a working table on which a wafer is put; X and Y driving units horizontally moving the working table at a predetermined position, a wafer cassette elevating apparatus provided to be positioned under a working area of the working table to move up and down a cassette containing the wafer, a wafer transferring unit transferring the wafer from the cassette to the working table; and a carrier containing a chip transferred from the working table, and a picker transferring the chip from the working table to the carrier. The position of the working table over the cassette of the cassette elevating apparatus can largely reduce the size of the chip sorter.
|