SEMICONDUCTOR TESTING DEVICE, PERFORMANCE BOARD AND INTERFACE PLATE

摘要

A semiconductor testing device (20) capable of collectively connecting different kinds of connectors on a performance board (200). The device comprises a test head body (100) containing a signal module (110) for generating a test signal used to test a device to be tested (10), an interface plate (200) electrically connected to a plate body (210) and the signal module (110), having a plurality of receptacles disposed on the plate body (210) and mounted on the test head body (100), and a performance board (300) having on one surface a connector fitted to and electrically connected with a receptacle, having on the other surface a testing socket (330) electrically connected with the connector and connected with the device to be tested (10), and mounted on the interface plate (200) by fitting the connector to a receptacle, the device further includes an elevating receptacle or a elevating connector to be displaced with respect to the plate body (210) in a direction in which the connector is inserted into or pulled out from a receptacle.