Plasma producing device, has chamber areas that are separately sealed by separating unit such that one of chamber areas is filled with fluid or permanent medium, and generator that transmits electromagnetic wave to antenna

摘要

The device has a low-pressure area formed as an evacuated chamber area (4A) and an electromagnetic wave feed area with an antenna (3) formed as a chamber area (4B) of a chamber (4). The chamber areas are separately sealed by a separating unit (5) such that the chamber area (4B) is filled with a fluid or permanent medium. A generator (2) is connected with the antenna by a conductor (7) to transmit the electromagnetic wave to the antenna.