PECVD OF TaN FILMS FROM TANTALUM HALIDE PRECURSORS,申请号KR20017013686-传众专利搜索

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发明名称	PECVD OF TaN FILMS FROM TANTALUM HALIDE PRECURSORS
摘要
申请公布号	KR100683296(B1)	申请公布日期	2007.02.15
申请号	KR20017013686	申请日期	2001.10.25
申请人		发明人
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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