| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic substrate which is hard to cause deformation such as a warp or a twist on a mounting surface, and free from missing or breakage even if vibration or deflection associated with the deformation occurs on a target of mounting, and to provide a manufacturing method of the ceramic substrate capable of efficiently manufacturing the substrate. SOLUTION: An auxiliary layer made of a hardly sintered material having a pillar-like electrode forming member mainly containing a metallic material is in tight contact with at least one of principal planes of an unbaked ceramic material 10. In addition, an unbaked ceramic material with an auxiliary layer having a step is formed on at least one of principal planes. The unbaked ceramic material with the auxiliary layer is baked at a temperature with which the auxiliary layer is not substantially sintered while the auxiliary layer is kept. Thereafter, the auxiliary layer is removed, and the electrode forming member is formed by sintering on the same plane as the principal plane having the stepped part. A ceramic sintered material including a stud electrode protruding from the principal plane with the stepped part is taken out. COPYRIGHT: (C)2007,JPO&INPIT |
