| 摘要 |
PROBLEM TO BE SOLVED: To provide an evaporation apparatus which prevents scattered matters from reaching a substrate, without installing any walls or other screens. SOLUTION: The evaporation apparatus for coating a plurality of substrates with at least one substance is equipped with at least one crucible having a melting zone, an evaporation zone, a heating zone provided between the melting and evaporation zones and connecting them, and heating equipment for individually heating the melting and evaporation zones to different temperatures. A melt substance flows from the melting zone into the evaporation zone via the heating zone, and the temperature in the heating zone is in between those of the melting zone and the evaporation zone. COPYRIGHT: (C)2007,JPO&INPIT
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