| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum evaporation apparatus that can improve productivity and a method of producing an electro-optical device using the same. SOLUTION: The vacuum evaporation apparatus 10 includes a target chamber 100, a process chamber 200, an a flight chamber 300. The respective chambers are composed so as to retain a vacuum independently, and an evaporation substance 110a generated from a target 110 is vapor-deposited on a substrate 210 held within the process chamber 200 rotatably by a fixture 900. COPYRIGHT: (C)2007,JPO&INPIT
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