| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator which can control a driving form and a connection order of a diaphragm, and can improve an electrostatic force while avoiding dielectric breakdown, and to provide a liquid droplet delivering head, a liquid droplet delivering apparatus, etc. SOLUTION: The electrostatic actuator comprises the diaphragm 4 driven by the electrostatic force, and a counter electrode 11 opposed with a gap to the diaphragm 4. An insulating film 30 is formed on a surface of the counter electrode 11 side of the diaphragm 4. The insulating film 30 has a plurality of regions (a first region 31 and a second region 32) formed of different materials. The plurality of regions are on the same plane. COPYRIGHT: (C)2007,JPO&INPIT
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