| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a projection aligner having a simple constitution which exactly aligns a substrate under projection to form a pattern on the substrate. <P>SOLUTION: The projection aligner has an alignment light radiating means for radiating an alignment light on a projection lens, from the back side of an exposure light irradiating means to a mounting means for irradiating a first reference mark provided on the mounting means and a second reference mark provided on a pattern substrate with the alignment light. <P>COPYRIGHT: (C)2007,JPO&INPIT |
