Verfahren zur Herstellung von Winkelgeschwindigkeitsmessern

摘要

A method of manufacturing an angular-rate sensor (1) by fabricating components of the angular-rate sensor on a silicon substrate (3), the components of the angular rate sensor (1) including one or more masses (20), a support beam and buried conductors (7). Detection means (21) are provided and the components are sealed in a cavity between a first glass plate (18) and a second glass plate (19) by anodic bonding. This enables angular rate sensors to be fabricated using low cost silicon wafers.