Carrier detachment device aligns inner, near-edge surface of frame with semiconductor disk and bonds them to foil, before detaching disk from carrier

摘要

A gripper guides a frame (12) and a semiconductor disk (24) with a carrier (22) into a space (20). An inner, near-edge surface (120) of the frame is aligned with a surface (240) of the disk, away from the carrier. A foil (26) having an adhesive layer, is fixed to the frame and the disk, before the carrier is detached from the disk.