| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly stiff wafer holder for wafer probers capable of improving position precision, soaking properties, and further rapid heating/cooling of a chip by enhancing a heat-insulating effect, and to provide a wafer prober device for mounting the wafer holder. SOLUTION: The wafer holder comprises a chuck top for placing a wafer; and a support for supporting the chuck top; and a regulating member for covering the interface between the chuck top and the support. A gap existing between the chuck top and the support is covered with the regulating member for preventing the fresh air from flowing into the support from the gap, thus enhancing a heat-insulating effect and improving a cooling speed especially when cooling at a room temperature or smaller. COPYRIGHT: (C)2007,JPO&INPIT |
