| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear scale with good repeatability which suppresses mechanical strain caused at setting and has small fluctuation of measuring accuracy. SOLUTION: The linear encoder has a glass scale 2, a slider unit 6 to obtain position measured values by scanning the glass scale 2 and a hollow scale base 1 containing the glass scale 2 and the slider unit 6. The scale base 1 has an attaching hole to attach the scale base and an attachment surface 23 for attaching a surface to be attached, and an escape region 24 which does not touch the surface to be attached in the region outside the surrounding of the attaching hole. COPYRIGHT: (C)2007,JPO&INPIT
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