发明名称 Piezoelektrisches/elektrostriktives Bauelement und dessen Herstellungsverfahren
摘要 A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections (16a, 16b), a movable section (20), and a fixation section (22) for supporting the thin plate sections (16a, 16b) and the movable section (20); one or more piezoelectric/electrostrictive elements (24a, 24b) arranged on the pair of thin plate sections (16a, 16b); and a hole (12) formed by both inner walls of the pair of thin plate sections (16a, 16b), an inner wall (20a) of the movable section (20), and an inner wall (22a) of the fixation section (22), wherein at least one thin plate section of the pair of thin plate sections (16a, 16b) are previously bent in directions to make mutual approach so that they have an inwardly convex configuration to the hole (12). <IMAGE>
申请公布号 DE60032699(D1) 申请公布日期 2007.02.15
申请号 DE2000632699 申请日期 2000.09.29
申请人 NGK INSULATORS LTD. 发明人 TAKEUCHI, YUKIHISA;NANATAKI, TSUTOMU;KIMURA, KOJI
分类号 B81B3/00;H01L41/09;B81C1/00;H01L41/083;H01L41/187;H01L41/22;H01L41/314;H01L41/338;H01L41/43;H02N2/00 主分类号 B81B3/00
代理机构 代理人
主权项
地址