| 摘要 |
PROBLEM TO BE SOLVED: To achieve a doping while reducing deteriorations in a filament, even when the multi-conditional doping is performed using an ion doping system equipped with the filament. SOLUTION: Upon completion of the ion doping, a material gas is stopped and a hydrogen or noble gas is made to flow. After hydrogen or the noble gas is made kept flowing, the filament temperature is dropped due to the lowering a filament current. As a result, a material gas around the filament can be replaced with hydrogen or the noble gas, when the filament temperature is dropped. COPYRIGHT: (C)2007,JPO&INPIT
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