| 摘要 |
PROBLEM TO BE SOLVED: To provide hollow spherical particles formed from gallium nitride which are useful as a light emitting material in a region from blue to ultraviolet and a material for a high temperature-high power electronic device; and a method for producing the same. SOLUTION: The method for producing the hollow spherical particles comprises heating a powder 4 of gallium chloride at 1,000-1,200°C in a mixed gas stream of ammonia gas and argon gas for 1.0-1.5 h. By this method, the hollow spherical particles formed from gallium nitride and having particle diameters of 15-20 nm and film thicknesses of 3.5-4.5 nm can be manufactured. In this case, it is preferable that the flow rate ratio of the ammonia gas and the inert gas is within a range of from 40:60 to 60:40 and the total flow rate of the ammonia gas and the inert gas is within a range of 400-500 sccm. COPYRIGHT: (C)2007,JPO&INPIT
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