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摘要
申请公布号
JP2007503110(A)
申请公布日期
2007.02.15
申请号
JP20060523521
申请日期
2004.08.16
申请人
发明人
分类号
H01L29/786;H01L21/336;H01L27/10;H01L29/12;H01L29/24;H01L29/423;H01L29/78
主分类号
H01L29/786
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