| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an inspection device, an inspection method, and an inspection program for inspecting a microstructure having a micro moving part by a simple system with sufficient precision. <P>SOLUTION: A test sound wave is inputted into the microstructure sensor device, and a frequency characteristic of the output voltage amplitude of the sensor responded to the input of the test sound wave is analyzed. A maximum frequency and a minimum frequency required for the device are computed from working conditions etc. assumed beforehand, and it is judged whether a desirable characteristic is detectable in that frequency band. To put it concretely, whether the device is defective or non-defective is determined, based on whether a response characteristic exceeds a minimum characteristic level being a threshold value in a predetermined frequency band. <P>COPYRIGHT: (C)2007,JPO&INPIT |
