| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas mixer which has a structure able to well and stably maintain the mixing precision from beginning of mixing to ending in the gas mixer. SOLUTION: The gas mixer has a base gas pipe 10 for supplying a base gas, an additive-gas pipe 20 for supplying an additive gas, and a mixture-gas pipe 30 for discharging a mixture gas which is mixed with above mentioned both gases, wherein the gas mixer has a laminar-flow element for the base gas 16 arranged between the base-gas pipe 10 and the mixture-gas pipe 30, a laminar-flow element for the additive gas 26 arranged between the additive-gas pipe 20 and the mixture-gas pipe 30, and an equalizing valve 40 arranged in the added-gas pipe 20 in the flowing-in side of the laminar-flow element for the additive gas 26 to equalize the pressure of the gas flowing-in side of the laminar-flow element for the base gas 16 and the laminar-flow element for additive gas 26, and the laminar element for the base gas 16 and the laminar element for additive gas 26 carry out flow controlling due to a pressure difference generating in the upper flowing part and the lower flowing part by determining the flow-rate sectional area according to the mixture ratio of the base gas and the additive gas in the mixture gas. COPYRIGHT: (C)2007,JPO&INPIT
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