| 发明名称 |
STRUCTURE AND METHOD FOR IMPROVING PHOTORESIST PATTERN ADHESION |
| 摘要 |
An anti-reflective coating comprises a plurality of main backbone chains, and at least one long free polymer chain coupled to at least one of the plurality of main backbone chains.
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| 申请公布号 |
US2007037089(A1) |
申请公布日期 |
2007.02.15 |
| 申请号 |
US20060427721 |
申请日期 |
2006.06.29 |
| 申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
CHANG CHING-YU |
| 分类号 |
G03C1/00 |
主分类号 |
G03C1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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