发明名称 SENSOR DEVICE PROVIDED WITH A SENSOR COMPONENT AND A SUPPORT AND A METHOD FOR PRODUCING SAID SENSOR DEVICE
摘要 The invention relates to a sensor device comprising a sensor component and a support and to a method for producing said sensor device, wherein said sensor component is embodied in such a way that it contacts or is contactable with the support in a first space area by means of a plurality of surface contact elements, the sensor component or the support is provided with a flow stop which makes it possible to prevent a fluid, which fills the first space area between the surface contact elements, to flow from said first space area towards the second space area.
申请公布号 WO2007017328(A1) 申请公布日期 2007.02.15
申请号 WO2006EP63997 申请日期 2006.07.07
申请人 ROBERT BOSCH GMBH;WEIBLEN, KURT;KNIES, SONJA;PLOETZKE, ANDREAS 发明人 WEIBLEN, KURT;KNIES, SONJA;PLOETZKE, ANDREAS
分类号 B81C99/00;H01L21/56 主分类号 B81C99/00
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