发明名称 |
SENSOR DEVICE PROVIDED WITH A SENSOR COMPONENT AND A SUPPORT AND A METHOD FOR PRODUCING SAID SENSOR DEVICE |
摘要 |
The invention relates to a sensor device comprising a sensor component and a support and to a method for producing said sensor device, wherein said sensor component is embodied in such a way that it contacts or is contactable with the support in a first space area by means of a plurality of surface contact elements, the sensor component or the support is provided with a flow stop which makes it possible to prevent a fluid, which fills the first space area between the surface contact elements, to flow from said first space area towards the second space area. |
申请公布号 |
WO2007017328(A1) |
申请公布日期 |
2007.02.15 |
申请号 |
WO2006EP63997 |
申请日期 |
2006.07.07 |
申请人 |
ROBERT BOSCH GMBH;WEIBLEN, KURT;KNIES, SONJA;PLOETZKE, ANDREAS |
发明人 |
WEIBLEN, KURT;KNIES, SONJA;PLOETZKE, ANDREAS |
分类号 |
B81C99/00;H01L21/56 |
主分类号 |
B81C99/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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