发明名称 |
METHOD AND APPARATUS FOR FORMING A THIN-FILM SOLAR CELL USING A CONTINUOUS PROCESS |
摘要 |
The present invention relates to new methods for manufacturing photovoltaic devices and an apparatus for practicing those methods of manufacture. The present invention employs a transfer-through system for advancing work piece substrates through an integrated apparatus of multiple treatment chambers that control each of the manufacturing processes. |
申请公布号 |
WO2006053129(A3) |
申请公布日期 |
2007.02.15 |
申请号 |
WO2005US40744 |
申请日期 |
2005.11.10 |
申请人 |
DAYSTAR TECHNOLOGIES, INC.;TUTTLE, JOHN, R. |
发明人 |
TUTTLE, JOHN, R. |
分类号 |
C23C16/00 |
主分类号 |
C23C16/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|