DEVICE FOR MEASURING CAPACITY

摘要

The proposed device for measuring capacity can be used in testing semiconductor devices. The proposed device is distinctive by its enhanced repeatability of measurement results due to that the device additionally contains a gain-controlled amplifier, a comparator, an intermediate amplifier, a detector, and a switch. The said additional elements provide a possibility to exclude the dependence of the output signal of the device on the parameters of the high-frequency signal amplifier and high-frequency oscillator of the device.