Controlled cooling of sputter targets,申请号EP20040257825-传众专利搜索

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发明名称	Controlled cooling of sputter targets
摘要
申请公布号	EP1589129(B1)	申请公布日期	2007.02.14
申请号	EP20040257825	申请日期	2004.12.16
申请人	HERAEUS INC	发明人	CHENG, YUANDA R.;RACINE, MICHAEL GENE;KENNEDY, STEVE ROGER;DEODUTT, ANAND S.
分类号	C23C14/34;H01L21/285	主分类号	C23C14/34
代理机构		代理人
主权项
地址

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