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发明名称
Planarising a semiconductor substrate
摘要
申请公布号
EP0878836(B1)
申请公布日期
2007.02.14
申请号
EP19980303917
申请日期
1998.05.18
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIN, CHANG-GYU;CHOI, JI-HYUN;HONG, SEOK-JI
分类号
H01L21/3205;H01L21/768;H01L21/3105
主分类号
H01L21/3205
代理机构
代理人
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地址
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