OPPOSING TARGET TYPE SPUTTER DEVICE,申请号KR20067020085-传众专利搜索

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发明名称	OPPOSING TARGET TYPE SPUTTER DEVICE
摘要
申请公布号	KR20070018895(A)	申请公布日期	2007.02.14
申请号	KR20067020085	申请日期	2006.09.28
申请人		发明人
分类号	H01L21/203	主分类号	H01L21/203
代理机构		代理人
主权项
地址

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