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发明名称
APPARATUS FOR BLANKING A CHARGED PARTICLE BEAM
摘要
申请公布号
EP1751784(A2)
申请公布日期
2007.02.14
申请号
EP20050738974
申请日期
2005.05.13
申请人
NANOBEAM LIMITED
发明人
ZHANG, TAO
分类号
H01J37/04;G03F7/00;G21K1/087;H01J9/14;H01J37/09;H01J37/147;H01J37/15
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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