| 摘要 |
<p>A scanning mechanism for a scanning probe microscope includes an X-Y stage including a movable portion (4), an X-Y elastic member, Z elastic members (7A, 7B), and a stationary portion (5), a stationary base (1) to which the X-Y stage is fixed, an X piezoelectric element (2A) that moves the movable portion (4) in an X direction, a Y piezoelectric element that moves the movable portion (4) in a Y direction, a substrate (11) that is fixed to the upper surface of the movable portion (4), a Z piezoelectric element (3) that is fixed to the upper surface of the substrate (11) and moves a moving target in a Z direction, a cover (9) that covers most of the movable portion (4), the X actuator (2A), and the Y actuator, and a damping member (10) that is located between the cover (9) and the movable portion (4) around the Z piezoelectric element (3). The Z piezoelectric element (3) has the upper end that is positioned at a position higher than the upper surface of the cover (9).</p> |
