load lock chamber of semiconductor device manufacturing equipment,申请号KR20050072590-传众专利搜索

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发明名称	load lock chamber of semiconductor device manufacturing equipment
摘要
申请公布号	KR20070018177(A)	申请公布日期	2007.02.14
申请号	KR20050072590	申请日期	2005.08.09
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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