Process tube connecting structure of semiconductor oxide etching device,申请号KR20050073196-传众专利搜索

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发明名称	Process tube connecting structure of semiconductor oxide etching device
摘要
申请公布号	KR20070018465(A)	申请公布日期	2007.02.14
申请号	KR20050073196	申请日期	2005.08.10
申请人		发明人
分类号	H01L21/302	主分类号	H01L21/302
代理机构		代理人
主权项
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