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发明名称
METHOD AND COMPOSITION FOR DRY PHOTORESIST STRIPPING IN SEMICONDUCTOR FABRICATION
摘要
申请公布号
EP1053566(B1)
申请公布日期
2007.02.14
申请号
EP19980961796
申请日期
1998.12.01
申请人
LAM RESEARCH CORPORATION
发明人
LEE, CHANGHUN;YANG, YUN-YEN, JACK
分类号
H01L21/302;H01L21/311;G03F7/42;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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