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发明名称
POLISHING PAD HAVING A WINDOW WITH REDUCED SURFACE ROUGHNESS
摘要
申请公布号
KR20070018711(A)
申请公布日期
2007.02.14
申请号
KR20060074945
申请日期
2006.08.09
申请人
发明人
分类号
B24B37/00;B24D11/00;H01L21/304
主分类号
B24B37/00
代理机构
代理人
主权项
地址
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