发明名称 ROTATE TYPE SPRAY APPARATUS AND MANUFACTURE APPARATUS FOR FLAT PANEL DISPLAY
摘要 A rotation-type spray apparatus for a flat panel display and its manufacturing apparatus are provided to improve distribution characteristics of a spray solution by rotating a spray nozzle at a predetermined angle. A driving unit(24) provides rotational force. A spray solution supply pipe(21) is coupled to the driving unit to receive the rotational force. A spray nozzle(22) is mounted on the spray solution supply pipe. A controller controls a revolution of the driving unit. The driving unit consists of a driving motor and a driving power transfer unit coupled to the driving motor and the spray solution supply pipe so as to transfer the rotation force from the driving motor to the spray solution supply pipe.
申请公布号 KR100684981(B1) 申请公布日期 2007.02.13
申请号 KR20060113446 申请日期 2006.11.16
申请人 G&G TECHNOLOGY CO., LTD. 发明人 PARK, MOON SIK;PARK, YOUNG GYU;LEE, EUNG MIN
分类号 H01L21/304 主分类号 H01L21/304
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