发明名称 |
Electrode-built-in susceptor and a manufacturing method therefor |
摘要 |
An electrode-built-in susceptor comprises a mounting plate and a supporting plate which are made of an aluminium-nitride-group-sintered member, an inner electrode which is made of a conductive aluminium-nitride-tantalum-nitride-composite-sintered-member or a conductive aluminium-nitride-tungsten-composite-sintered-member so as to be formed between the mounting plate and the supporting plate, power supplying terminals 16, 16 which is disposed in fixing holes 13, 13 which are formed on the supporting plate so as to be attached to the inner electrode. The power supplying terminals are made of a conductive aluminium-nitride-tantalum-nitride-composite-sintered-member. By doing this, it is possible to provide an electrode-built-in susceptor which has superior durability under a high temperature oxidizing atmosphere condition and a method for manufacturing an electrode-built-in susceptor with a high product yield and a low production cost.
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申请公布号 |
US7175714(B2) |
申请公布日期 |
2007.02.13 |
申请号 |
US20030613574 |
申请日期 |
2003.07.03 |
申请人 |
SUMITOMO OSAKA CEMENT CO., LTD. |
发明人 |
OOTSUKA TAKESHI;ENDOU KAZUNORI |
分类号 |
H01L29/06;H05B3/02;C23C16/458;H01J37/32;H01L21/00;H01L21/02;H01L21/683;H05B3/10;H05B3/74 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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