| 发明名称 |
Refurbishing spent sputtering targets |
| 摘要 |
Spent sputtering targets are refurbished by filling the depleted region of the target with new sputter material using a hot isostatic pressing or HIP'ing technique. |
| 申请公布号 |
US7175802(B2) |
申请公布日期 |
2007.02.13 |
| 申请号 |
US20020243948 |
申请日期 |
2002.09.16 |
| 申请人 |
HERAEUS, INC. |
发明人 |
SANDLIN MICHAEL;ZHANG WENJUN;KUNKEL BERND |
| 分类号 |
C23C14/34;B22F7/00;B22F7/06;G11B5/851 |
主分类号 |
C23C14/34 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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