| 摘要 |
A method for manufacturing a flux supply pin for use in a flux supply tool of semiconductor device manufacture equipment using MEMS technology and the flux supply pin are provided to dot a flux with a required size and integration degree. A mold(40) for use in a flux supply pin manufacture is manufactured by using MEMS technology. A molten material(50) is filled in the mold and, simultaneously, pressure is applied to an inner space of the mold to tightly fill the molten material in the mold without bubbles. The molten material is a mixture of a molten resin or polymer with fine particles. The molten material is cooled to be hardened. A molded flux supply pin is separated from the mold. A metal plate(23) is attached on an upper surface of the flux supply pin separated from the mold.
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