发明名称 APPARATUS FOR MEASURING TEMPERATURE BY ADJUSTING POSITION ACCORDING TO THE SPEED OF HEAT SOURCE IN MCVD PROCESS
摘要 An apparatus for measuring temperature by adjusting a position according to speed of a heat source in an MCVD process is provided to reduce temperature measuring errors of a tube generated according to change of moving speed of a furnace. In an apparatus for measuring temperature by adjusting a position according to speed of a heat source in an MCVD process, a sliding member(7) is installed inside of a furnace(4). The sliding member slides in parallel in a lengthwise direction of the furnace. A temperature measuring unit(2) is installed on the sliding member to measure temperature of a mother tube passing through the furnace. A sliding control unit(1) controls distance moved by the sliding member according to a predetermined control signal. A temperature measurement place is moved according to a movement of the sliding member. And, the sliding member is installed on an incision member for measuring the temperature of the furnace.
申请公布号 KR100685084(B1) 申请公布日期 2007.02.13
申请号 KR20060013736 申请日期 2006.02.13
申请人 LS CABLE LTD. 发明人 KIM, YOUNG GHI
分类号 G01K13/06;G01K13/00 主分类号 G01K13/06
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