摘要 |
An apparatus for measuring temperature by adjusting a position according to speed of a heat source in an MCVD process is provided to reduce temperature measuring errors of a tube generated according to change of moving speed of a furnace. In an apparatus for measuring temperature by adjusting a position according to speed of a heat source in an MCVD process, a sliding member(7) is installed inside of a furnace(4). The sliding member slides in parallel in a lengthwise direction of the furnace. A temperature measuring unit(2) is installed on the sliding member to measure temperature of a mother tube passing through the furnace. A sliding control unit(1) controls distance moved by the sliding member according to a predetermined control signal. A temperature measurement place is moved according to a movement of the sliding member. And, the sliding member is installed on an incision member for measuring the temperature of the furnace.
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