INTEGRAL MICROMECHANICAL GYROSCOPE

摘要

FIELD: measuring technique; micro-system engineering. ^ SUBSTANCE: gyroscope can be used for measuring angular velocity. Two additional motionless electrodes of capacitive shift converters are introduced into gyroscope. Converters are made of semiconductor material and they are disposed directly onto substrate. There are also two additional inertial weights made of semiconductor material and they are disposed to have space relatively semiconductor substrate in such a way that they form flat capacitors together with two additional motionless electrodes of capacitive pick-ups. There are six additional torsion beams made off semiconductor material and they are disposed to have space in relation to semiconductor substrate. External frame is made in form of ring and it is connected with middle frame by means of four additional connecting members. Inertial weights are disposed between external and medium frames and they are connected together by means of torsion beams. Value of angular speed can be measured around axes of X, Y and Z disposed in mutual perpendicular in plane of gyroscope's substrate. ^ EFFECT: improved precision of measurement. ^ 2 dwg