MICRO PIEZOELECTRIC LINEAR MOTOR

摘要

A micro piezoelectric linear motor is provided to realize miniaturization and to increase degree of freedom in configuration by reducing influence of a piezoelectric ceramic. A micro piezoelectric linear motor includes a beam shaped elastic substrate(23), a piezoelectric body(22), and a shaft(21). A hollow core is formed inside the beam shaped elastic substrate(23). The piezoelectric body(22) is attached to an upper part of the elastic substrate(23). The shaft(21) is formed on the upper part of the elastic substrate(23). The piezoelectric body(22) is displaced in a perpendicular direction to a displacement direction of the shaft(21). A length of the piezoelectric body(22) according to a lengthwise direction of the elastic substrate(23) is shorter than a length of the hollow core.