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发明名称
Method for forming recessed gate of semiconductor device
摘要
申请公布号
KR100680965(B1)
申请公布日期
2007.02.09
申请号
KR20050058172
申请日期
2005.06.30
申请人
发明人
分类号
H01L21/336;H01L21/335
主分类号
H01L21/336
代理机构
代理人
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