摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a color filter substrate by simply correcting a black matrix exposure pattern, fabricating an exposure mask and forming a black matrix in a black matrix forming process in which a series of patterning treatments such as pattern exposure with a proximity exposure method on a black photosensitive resin layer on a transparent substrate, a development treatment and so on are conducted. <P>SOLUTION: The color filter substrate 100 is fabricated by forming the black matrix 21a on the transparent substrate 11 by using the exposure mask having a corrected pattern width of the black matrix adjacent to a specified position, and further by forming coloring color filter layers 30 composed of a red color filter 31R, a green color filter 31G, and a blue color filter 31B. <P>COPYRIGHT: (C)2007,JPO&INPIT |