| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method with which a micro-mirror element package can be fabricated through a batch step performed in terms of a wafer size. <P>SOLUTION: The micro-mirror element package includes a micro-mirror element; a substrate, on which the micro-mirror element is mounted; and a window lid mounted on the substrate to cover the micro-mirror element. The window lid is oblique in a part of its light transmitting upper face. The light transmitting part is sloped in relation to the micro-mirror element, and through which laser beams are transmitted to the micro-mirror element, and supporting parts downwardly extending from the light transmitting part. When a laser beam is input, the package separates the laser beam from noise beams, thereby improving the quality of image on a screen. By fabricating an array of window lids which correspond to micro-mirror elements, respectively, it is possible to fabricate the above-mentioned micro-mirror element package through a batch step performed in terms of a wafer size. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
