| 摘要 |
PROBLEM TO BE SOLVED: To correctly calculate the positional information of a specific chip on a wafer. SOLUTION: In the method of calculating the positional information of each of a plurality of chips 1a formed on the wafer 1, an address in the X direction and an address in the Y direction which crosses the X direction at right angles are given to each chip 1a on the wafer 1. Using the addresses in the X and Y directions of the chips 1a, the center 1b of the wafer 1 is calculated. Then, the number of chips in the X direction and the number of chips in the Y direction from the center 1b to a specific chip 1a are calculated. The specific positional information showing the positional information of the specific chip 1a is calculated by multiplying the calculated number of chips in the X direction by the chip size in the X direction and the calculated number of chips in the Y direction by the chip size in the Y direction. COPYRIGHT: (C)2007,JPO&INPIT |
