摘要 |
PROBLEM TO BE SOLVED: To provide a gas sensor element suppressing lowering of adhesion force between an induction layer and a catalytic section even utilizing over a long period and a production method of the gas sensor element. SOLUTION: In a heat treatment process heating an induction layer (41) and a catalytic section (42) of production processes of gas sensor elements (1), concentration of oxygen is specified to 10 ppm or less. Since in the catalytic section (42) of the gas sensor element (1), fraction of particles (particles by which adhesion condition with the induction layer 41 is in good) with aspect ratio of 2.0 or more is specified to at least be 20% or more, exfoliation from the induction layer (41) can be suppressed. Since the induction layer (41) and the catalyst section (42) are treated with heat, enhancement of temporal stability of the element resistance can be attempted in the gas sensor element (1). Therefore, the gas sensor element (1) can suppress the lowering of adhesion force between an induction layer and a catalytic section, while attempting to enhance temporal stability of the element resistance. COPYRIGHT: (C)2007,JPO&INPIT
|