| 摘要 |
An electro-optical device includes: an electro-optical device substrate; step portions having a concave shape that are formed on a predetermined insulating film of the electro-optical device substrate; side wall portions each of which is formed on a side surface of the concave step portion between the surface of the insulating layer and the bottom of the step portion and has an upward convex curved surface, the surface of the curved surface being continuously formed with the surface of the insulating film at the top of the concave step portion; and capacitive elements each of which is formed on the step portion and the side wall portion and has a lower electrode layer, an upper electrode layer, and a dielectric layer interposed between the lower electrode layer and the upper electrode layer.
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